3D IC Decoupling capacitor structure and method for manufacturing the same

ABSTRACT

A semiconductor structure is disclosed. The semiconductor structure includes: a polymer base layer; a backside redistribution layer (RDL) over the polymer base layer; a molding layer over the backside RDL; a polymer layer over the molding layer; a front side RDL over the polymer layer; and a metal-insulator-metal (MIM) capacitor vertically passing through the molding layer, the MIM capacitor including a first electrode, an insulation layer and a second electrode, wherein the insulation layer surrounds the first electrode, and the second electrode surrounds the insulation layer, and the molding layer surrounds the second electrode. An associated method for manufacturing a semiconductor structure is also disclosed.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a division of application Ser. No. 15/600,224, filedon May 19, 2017. All of the above-referenced applications are herebyincorporated herein by reference in their entirety.

BACKGROUND

Capacitors are widely used in integrated circuits. The capacitance of acapacitor is proportional to the capacitor area and the dielectricconstant (k) of the insulation layer, and is inversely proportional tothe thickness of the insulation layer. Therefore, to increase thecapacitance, it is preferable to increase the area and k value and toreduce the thickness of the insulation layer.

A problem associated with the increased area is that a greater chip areais required. Conventional metal-insulator-metal (MIM) capacitors inintegrated circuits have various horizontal comb structures. Thehorizontal structure capacitance correlates with inter-metal layerthickness. However, the thickness of an inter-metal layer is verydifficult to control. This results in high variation of MIM capacitancein production for a target value. Accordingly, new methods andstructures are desired for MIM capacitors.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. Specifically, dimensions of thevarious features may be arbitrarily increased or reduced for clarity ofdiscussion.

FIG. 1 is a schematic diagram illustrating an integrated Fan-Out (InFO)package including a metal-insulator-metal (MIM) capacitor in accordancewith some embodiments of the present disclosure; and

FIGS. 2-20 are cross sectional views of the InFO package at differentstages of the manufacturing process, in accordance with some embodimentsof the present disclosure.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a first feature over or on a second feature in the description thatfollows may include embodiments in which the first and second featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the first and second features,such that the first and second features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and configurations discussed.

Further, spatially relative terms, such as “beneath,” “below,” “lower,”“above,” “upper” and the like, may be used herein for ease ofdescription to describe one element or feature's relationship to anotherelement or feature as illustrated in the figures. The spatially relativeterms are intended to encompass different orientations of the device inuse or operation in addition to the orientation depicted in the figures.The apparatus may be otherwise oriented (rotated 90 degrees or at otherorientations) and the spatially relative descriptors used herein maylikewise be interpreted accordingly.

Notwithstanding that the numerical ranges and parameters setting forththe broad scope of the disclosure are approximations, the numericalvalues set forth in the specific examples are reported as precisely aspossible. Any numerical value, however, inherently contains certainerrors necessarily resulting from the standard deviation found in therespective testing measurements. Also, as used herein, the term “about”generally means within 10%, 5%, 1%, or 0.5% of a given value or range.Alternatively, the term “about” means within an acceptable standarderror of the mean when considered by one of ordinary skill in the art.Other than in the operating or working examples, or unless otherwiseexpressly specified, all of the numerical ranges, amounts, values andpercentages such as those for quantities of materials, durations oftimes, temperatures, operating conditions, ratios of amounts, and thelikes thereof disclosed herein should be understood as modified in allinstances by the term “about.” Accordingly, unless indicated to thecontrary, the numerical parameters set forth in the present disclosureand attached claims are approximations that can vary as desired. At thevery least, each numerical parameter should at least be construed inlight of the number of reported significant digits and by applyingordinary rounding techniques. Ranges can be expressed herein as from oneendpoint to another endpoint or between two endpoints. All rangesdisclosed herein are inclusive of the endpoints, unless specifiedotherwise.

FIG. 1 is a schematic diagram illustrating an integrated Fan-Out (InFO)package 200 including a metal-insulator-metal (MIM) capacitor 220 inaccordance with some embodiments of the present disclosure. An upperside of the InFO package 200 shown in FIG. 1 is referred to as a frontside 102, and a lower side of the InFO package 200 is referred to as abackside 104. For illustration, the InFO package 200 includes a polymerbase layer 203, an InFO backside redistribution layer (RDL) 204, aconductive layer 205, a conductive through molding via (TMV) 206, adevice die 208, a molding layer 209, polymer layers 211, 213, and 215,InFO front side redistribution layers (RDLs) 212 and 214, an under bumpmetallurgies (UBM) 216, an external connector 217, and the MIM 220.Please note that the TMV 206 may be also referred to as throughinsulator vias (TIV).

As illustratively shown in FIG. 1, in some embodiments, the MIMcapacitor 220 includes the first electrode 207, the insulation layer 218and the second electrode 210. The molding layer 209 surrounds or circlesaround an outer sidewall sidewall 114 of the second electrode 210; thesecond electrode 210 surrounds or circles around an outer sidewall 108of the insulation layer 218; and the insulation layer 218 surrounds orcircles around an outer sidewall sidewall 106 of the first electrode207. In addition, an outer bottom surface 112 of the insulation layer218 is covered by the second electrode 210; and an outer bottom surface110 of the first electrode 207 is covered by the insulation layer 218.In other words, the outer sidewall 106 and the outer bottom surface 110of the first electrode 207 is lined with the insulation layer 218; andthe outer sidewall 108 and the outer bottom surface 112 of theinsulation layer 218 is lined with the second electrode 210. Since theMIM capacitor 220 is fabricated simultaneously with other features ofthe package 200, the manufacturing cost is relatively low.

For illustration, the MIM capacitor 220 is formed within the moldinglayer 209. The first electrode 207 of the MIM capacitor 220 iselectrically coupled to the RDL 214, the second electrode 210 of the MIMcapacitor 220 is electrically coupled to the InFO backside RDL 204. Thefirst electrode 207 and the second electrode 210 of the MIM capacitor220 are formed by a conductive material overlying a seed layer. Thefirst electrode 207 and the second electrode 210 of the MIM capacitor220 are insulated by the insulation layer 218. The MIM capacitor 220 isfilled within the TMV extending through the molding layer 209.

In some embodiments, a molding compound is applied in the molding layer209 to surround the device die 208 and the MIM capacitor 220 on thepolymer base layer 203. In some embodiments, the molding compound MCincludes high-k polymer or silica.

In some embodiments, the polymer layer 211 overlies the molding layer209. The RDL 212 overlies the polymer layer 211. The polymer layer 213overlies the RDL 212. The RDL 214 overlies the polymer layer 213. Thepolymer layer 215 overlies the RDL 214. The Under Bump Metallurgies(UBMs) 216 are formed over the RDL 214. The external connectors 217 aredisposed on the UBMs 216 and configured to be the input/output (I/O)pads, including, for example, solder balls, to electrically connect tothe device die 208 through the RDL 214. In some embodiments, theexternal connectors 217 are ball grid array (BGA) balls, controlledcollapse chip connector (C4) bumps, or the like. In some embodiments,the connectors 217 are used to electrically connect package 200 to otherpackage components including, for example, another device die,interposers, package substrates, printed circuit boards, a mother board,or the like.

FIGS. 2-20 are cross sectional views of the InFO package 200 atdifferent stages of the manufacturing process, in accordance with someembodiments of the present disclosure. Like elements in FIGS. 2-20 aredesignated with the same reference numbers for ease of understanding.After the different stages in FIGS. 2-20, the package 200 has the crosssectional view in FIG. 1. Although FIGS. 2-20 are described, it will beappreciated that the structures disclosed in FIG. 1 are not limited tothe manufacturing process shown in FIGS. 2-20. While disclosedmanufacturing process is illustrated and described herein as a series ofacts or events, it will be appreciated that the illustrated ordering ofsuch acts or events are not to be interpreted in a limiting sense. Forexample, some acts may occur in different orders and/or concurrentlywith other acts or events apart from those illustrated and/or describedherein. In addition, not all illustrated acts may be required toimplement one or more aspects or embodiments of the description herein.Further, one or more of the acts depicted herein may be carried out inone or more separate acts and/or phases.

As illustrated in FIG. 2, the carrier 201, the adhesive layer 202, andthe polymer base layer 203 are provided. In some embodiments, thecarrier 201 includes glass, ceramic, or other suitable material toprovide structural support during the formation of various features indevice package. In some embodiments, the adhesive layer 202, including,for example, a glue layer, a light-to-heat conversion (LTHC) coating, anultraviolet (UV) film or the like, is disposed over the carrier 201. Thepolymer base layer 203 is coated on the carrier 201 via the adhesivelayer 202. In some embodiments, the carrier 201 and the adhesive layer202 are removed from the InFO package after the packaging process. Insome embodiments, the polymer base layer 203 is formed ofPolyBenzOxazole (PBO), Ajinomoto Buildup Film (ABF), polyimide,BenzoCycloButene (BCB), Solder Resist (SR) film, Die-Attach Film (DAF),or the like, but the present disclosure is not limited thereto.

Subsequently, the RDL 204 is formed, as illustrated in FIG. 3. In someembodiments, the RDL 204 includes conductive features, including, forexample, conductive lines and/or vias, formed in one or more polymerlayers. In some embodiments, the polymer layers are formed of anysuitable material, including PI, PBO, BCB, epoxy, silicone, acrylates,nano-filled pheno resin, siloxane, a fluorinated polymer,polynorbornene, or the like, using any suitable method, including, forexample, a spin-on coating technique, sputtering, and the like.

In some embodiments, the conductive features are formed in polymerlayers. The formation of such conductive features includes patterningpolymer layers, for example, using a combination of photolithography andetching processes, and forming the conductive features in the patternedpolymer layers, for example, depositing a seed layer (i.e., TiCu) andthen plating a conductive metal layer (i.e., Cu) and using a mask layerto define the shape of the conductive features. For illustration, someconductive features are designed to form functional circuits coupled tothe MIM capacitor 220, and input/output features for subsequentlyattached dies.

Next, a patterned photoresist 601 is formed over the RDL 204 and thecarrier 201, as illustrated in FIG. 4. In some embodiments, for example,a photoresist is deposited as a blanket layer over the RDL 204. Next,portions of the photoresist are exposed using a photo mask (not shown).Exposed or unexposed portions of the photoresist are then removeddepending on whether a negative or positive resist is used. Theresulting patterned photoresist 601 includes openings 602 vertically,i.e. along Y-axis, passing through the patterned photoresist 601. Insome embodiments, the openings 602 further expose conductive features inthe RDL 204. The openings 602 may have a high aspect ratio with a heightof about 180 um to about 250 um and a width of about 50 um to about 300um.

Next, a conductive layer 501 is deposited overlying the patternedphotoresist 601, as illustrated in FIG. 5. The conductive layer 501 maybe formed of any suitable conductive material, including Cu, Ni, Pt, Al,lead-free solder (e.g., SnAg, SnCu, SnAgCu), combinations thereof, orthe like, and may be formed through any number of suitable techniques,including electroplating, physical vapor deposition (PVD), chemicalvapor deposition (CVD), electrochemical deposition (ECD), molecular beamepitaxy (MBE), atomic layer deposition (ALD), and the like. Theconductive layer 501 may have a thickness of about 1 um to about 8 um.In some embodiments, a seed layer may be deposited overlying thepatterned photoresist 601 before the conductive layer 501 is deposited.The seed layer may be a thin layer of a conductive material that aids inthe formation of the thicker conductive layer 501. In an embodiment, theseed layer is formed by depositing a thin layers of Ti, Cu, Ta, TiN,TaN, combinations thereof, or the like, using CVD or PVD techniques.

Next, the insulation layer 218 is deposited overlying the conductivelayer 501 as illustrated in FIG. 6. The insulation layer 218 may beformed of any suitable dielectric material. In some other embodiments,the insulation layer 218 may include low-temperature (e.g., 180° C.)silicon dioxide (CVD—SiO₂), silicon nitride (SiN_(x), having dielectricconstant (k) of about 6.9) or silicon oxynitride (SiO_(x)N_(y))deposited by any suitable depositions such as chemical vapor deposition(CVD), plasma enhanced CVD (PECVD), sub-atmospheric CVD (SACVD),atmospheric pressure CVD (APCVD), metal organic CVD (MOCVD), laser CVD(LCVD), etc. In some embodiments, the insulation layer 218 may includelow-temperature (e.g., <240° C.) titanium dioxide (TiO₂) deposited byLCVD, electron beam (e.g. electronic gun) evaporation or etc. In someembodiments, the insulation layer 218 may include low-temperature (e.g.,210° C.) high-k dielectric material such as zirconium dioxide (ZrO₂),aluminum oxide (Al₂O₃), hafnium oxide (HfO_(x)), Hafnium silicate(HfSiO_(x)), zirconium titanate (ZrTiO_(x)), tantalum oxide (TaO_(x)), alaminated layer of ZrO₂—Al₂O₃—ZrO₂ (ZAZ, having dielectric constant (k)of about 13.6), etc. In some embodiments, the insulation layer 218 mayinclude strontium titanate (SrTiO₃ having dielectric constant (k) ofabout 83 to about 100) or barium titanate (BaTiO₃, having dielectricconstant (k) of about 500). In some embodiments, the insulation layer218 may include barium strontium titanate (BaSrTiO₃, BST), leadzirconate titanate (PbZrTiO₃, PZT).

Next, a patterned photoresist 701 is formed over the insulation layer218, as illustrated in FIG. 7. In some embodiments, for example, aphotoresist is deposited as a blanket layer over the insulation layer218. Next, portions of the photoresist are exposed using a photo mask(not shown). Exposed or unexposed portions of the photoresist are thenremoved depending on whether a negative or positive resist is used. Theresulting patterned photoresist 701 fills the opening 602 at the leftside for the MIM capacitor 220. In addition, the resulting patternedphotoresist 701 as well covers a portion of a top surface of theinsulation layer 218 around a top end of the opening 602 filled by thephotoresist. The opening 602 at the right side is left uncovered by thephotoresist. Please note that when fabricating the MIM capacitor 220simultaneously with other features of the package 200, the patternedphotoresist 701 may be the only mask additionally required.

In FIG. 8, exposed portions of the insulation layer 218 may be removedto expose the underlying conductive layer 501. In some embodiments, adry etch process is carried out by a plasma etch process thateffectively removes the high-k dielectric layer. Preferably, the plasmais generated from one or more halogen containing gases including CF₄,CHF₃, CH₂F₂, CH₃F, BCl₃, Br₂, HF, HCl, HBr, Hl, and NF₃. The process mayfurther employ one or more inert gases including Ar, He, Xe, andnitrogen. Optionally, one or more oxidant gases such as O₂, CO, CO₂, andN₂O may be added to the halogen containing gases or to the mixture ofhalogen containing gases and inert gases. After the exposed portions ofthe insulation layer 218 are etched back, the patterned photoresist 701is removed as shown in FIG. 9.

Next, a conductive layer 1001 is deposited overlying the conductivelayer 501, the insulation layer 218 and fills the openings 602. Theconductive layer 1001 may be formed of any suitable conductive material,including Cu, Ni, Pt, Al, lead-free solder (e.g., SnAg, SnCu, SnAgCu),combinations thereof, or the like, and may be formed through any numberof suitable techniques, including electroplating, physical vapordeposition (PVD), chemical vapor deposition (CVD), electrochemicaldeposition (ECD), molecular beam epitaxy (MBE), atomic layer deposition(ALD), and the like. The conductive layer 1001 may have a thickness ofabout 2 um to about 10 um. In some embodiments, a seed layer may bedeposited overlying the conductive layer 501 and the insulation layer218 before the conductive layer 1001 is deposited. The seed layer may bea thin layer of a conductive material that aids in the formation of thethicker conductive layer 1001. In an embodiment, the seed layer isformed by depositing a thin layers of Ti, Cu, Ta, TiN, TaN, combinationsthereof, or the like, using CVD or PVD techniques.

Next, excess portions of the conductive layer 1001 above the top surfaceof the insulation layer 218 may be removed. In some embodiments, achemical mechanical polishing (CMP) process may be performed. The CMPstops at the top surface of the insulation layer 218 as illustrated inFIG. 11. After the removal of the conductive layer 1001 above the topsurface of the insulation layer 218, excess portions of the conductivelayer 1001, the insulation layer 218, and the conductive layer 501 abovea top surface of the patterned photoresist 601 may be removed. In someembodiments, another CMP process may be performed. The CMP stops at thetop surface of the patterned photoresist 601 as illustrated in FIG. 12.The conductive layer 1001 remained in the left and right openings 602are denoted as the first electrode 207 and the TMV 206 respectively. Theconductive layer 501 remained in the left and right openings 602 aredenoted as the second electrode 210 and the conductive layer 205respectively. At this stage, the structure of the MIM capacitor 220including the first electrode 207, the insulation layer 218 and secondelectrode 210 is substantially formed over the InFO RDL 204.

Next, the photoresist 601 is removed, as illustrated in FIG. 13. In someembodiments, a wet strip process is used to remove the photoresist 601.In some embodiments, the wet strip solution contains Dimethylsufoxide(DMSO) and Tetramethyl ammonium hydroxide (TMAH) to remove thephotoresist material. After removing the photoresist 601, a device die208 may be mounted and attached to the package 200 as illustrated inFIG. 14 through a DAF 1401. The DAF 1401 may include a polymer and insome embodiments includes a thermoplastic material. The DAF 1401 may beliquid, e.g., a thick liquid, when applied but forms a solid at roomtemperature. The DAF 1401 may become semi-liquid when heated and maybecome sticky to function as an adhesive at elevated temperatures. TheDAF 1401 may include a polymer-based film that functions as an adhesivewhen heated, in some embodiments, for example. The device die 208includes a conductive pad 1402 making electrical contact with thesubsequent RDLs 212 and 214 through a conductive pillar 1403. In someembodiments, there may be more than one device die attached to thepackage 200.

Next, the molding layer 209 is formed over the polymer base layer 203 tofill gaps between the device die 208 and the MIM capacitor 220 and theTMV 206 as illustrated in FIG. 15. In some embodiments, the moldinglayer 209 includes molding compound material with relatively highdielectric constant, including, for example, high-K polymer or silica.In some embodiments, compressive molding, transfer molding, and liquidencapsulant molding are suitable methods for forming the molding layer209, but the present disclosure is not limited thereto. For example, themolding layer 209 may be dispensed in a liquid form. Subsequently, acuring process is performed to solidify the molding layer 209. In someembodiments, the filling of the molding layer 209 overflows the devicedie 208, the MIM capacitor 220, and the TMV 206, for example 50 um, sothat the molding layer 209 covers top surfaces of the device die 208,the MIM capacitor 220, and the TMV 206 and encapsulates the device die208, the MIM capacitor 220, the TMV 206, and the RDL 204.

Next, a grinding process is performed, excess portions of the moldinglayer 209 are removed to reduce its overall thickness and thus exposethe MIM capacitor 220 and the TMV 206. As shown in FIG. 16, the MIMcapacitor 220 vertically, i.e. along Y-axis, passing through the moldinglayer 209. A top surface of the first electrode 207, the insulationlayer 218 and the second electrode 210 of the MIM capacitor 220 areexposed. A top surface of the conductive pillar 1403, the TMV 206 andthe conductive layer 205 are exposed as well.

In some embodiments, at least a top portion of the first electrode 207and a top portion of the second electrode 210 are removed. As shown inFIG. 17, the insulation layer 218 of the MIM capacitor 220 is thereforeprotruding upward from the top surface of the first electrode 207 andthe top surface of the second electrode 210 by a depth D. In otherwords, the top surface of the first electrode 207 and the top surface ofthe second electrode 210 are recessed from the top surface of theinsulation layer 218 and the top surface of the molding layer 209 by adepth D. In some embodiments, the depth D is about 0.1 um to about 1 um.The protruding structure of the insulation layer 218 is capable ofefficiently isolating the first electrode 207 and the second electrode210. In some embodiments, the removal process may be performed bydipping the package 200 in a wet etchant, such as an acid solution, fora duration that is specified by the recipe setting in order to etchconductive materials such as Cu. Please note that a top portion of theconductive pillar 1403, the conductive layer 205, and the TMV 206 mayalso be removed by the wet etchant, but the present disclosure is notlimited thereto. In some embodiments, the top portion of the firstelectrode 207, the second electrode 210 may not be removed, i.e. thedepth D equals 0.

Next, the patterned polymer layer 211 having openings 211_2 to 211_4 isformed overlying the molding layer 209, the MIM capacitor 220, theconductive layer 205 and the TMV 206, as illustrated in FIG. 18. In someembodiments, the patterned polymer layer 211 includes a lateral overhangstructure 211_1 pinching around the top surface of the MIM capacitor220. The patterned polymer layer 211 covers the top surfaces of themolding layer 209, the second electrode 210, and the insulation layer218. In particular, the lateral overhang structure 211_1 of thepatterned polymer layer 211 further extends to cover a periphery regionof the top surface of the first electrode 207, leaving an inner portionof the top surface of the first electrode 207 uncovered by the lateraloverhang structure 211_1. As can be seen from a partially enlarged viewaround the overhang structure 211_1 in FIG. 18, the lateral overhangstructure 211_1 forms the hole 211_2 having a bottom opening width W1and a top opening width W3. The first electrode 207 has a width of W2which is greater than W1. In some embodiments, W2 is less than W3, andan edge of the top opening of the hole 211_2 may overlap the insulationlayer 218 from a top perspective view. However, the present disclosureis not limited thereto. In some embodiments, the edge of the top openingof the hole 211_2 may overlap the second electrode 210 or even themolding layer 209, which means the hole 211_2 has a wider top opening.In some embodiments, the hole 211_2 may have a narrower top opening andW3 may be less than W2 in that case. The overhang structure 211_1 iscapable of efficiently isolating the first electrode 207 and the secondelectrode 210 and avoiding accidently coupling the first electrode 207to the second electrode 210 at the subsequent RDL process.

In some embodiments, the polymer layer 211 includes PI, PBO, BCB, epoxy,silicone, acrylates, nano-filled pheno resin, siloxane, a fluorinatedpolymer, polynorbornene, or the like. In some embodiments, the polymerlayer 211 is selectively exposed to a plasma etchant, including, forexample, CF₄, CHF₃, C₄F₈, HF, etc., configured to etch the polymer layer211 in order to expose the first electrode 207 and the TMV 206. In someembodiments, the openings are filled with a conductive material. Forillustration, a seed layer (not shown) is formed in the openings and theconductive material is plated in the openings using, for example, anelectrochemical plating process, electroless plating process, or thelike. The resulting via holes in the polymer layer 211 are electricallycoupled to the first electrode 207 and the TMV 206 respectively. In someembodiments, one or more additional polymer layers having conductivefeatures, such as the RDL 212, are formed over the polymer layer 211. Asillustratively shown in FIG. 18, in some embodiments, the RDL 212 iselectrically coupled to the first electrode 207 and the TMV 206 throughthe via holes in the polymer layer 211.

In FIG. 19, the patterned polymer layer 213 having openings is formedoverlying the patterned polymer layer 211 and the RDL 212. In someembodiments, the polymer layer 213 includes PI, PBO, BCB, epoxy,silicone, acrylates, nano-filled pheno resin, siloxane, a fluorinatedpolymer, polynorbornene, or the like. In some embodiments, the polymerlayer 213 is selectively exposed to a plasma etchant, including, forexample, CF₄, CHF₃, C₄F₈, HF, etc., configured to etch the polymer layer213 to form the openings.

In some embodiments, the RDL 214 having at least one conductive featureis formed on the patterned polymer layer 213. As illustratively shown,in some embodiments, the conductive features are electrically coupled tothe conductive features in the RDL 212 through the via holes in thepolymer layer 213. The conductive feature is electrically coupled to thedevice die 208 through the conductive vias and the conductive pillar1403, and electrically coupled to the first electrode 207 of the MIMcapacitor 220 through the conductive vias. In some embodiments, the RDLs212 and 214 are substantially similar to the RDL 204 both in compositionand formation process, and thus detailed description is omitted forbrevity. In some embodiments, the patterned polymer layer 215 is formedoverlying the patterned polymer layer 213 and the RDL 214, asillustrated in FIG. 19.

In FIG. 20, the external connector 217, which is configured to be theinput/output (I/O) pads, including, for example, a solder ball on theUBM 216 is then formed to electrically connect to the device die 208through the RDL 214. In some embodiments, the connector 217 are ballgrid array (BGA) balls, controlled collapse chip connector (C4) bumps,and the like disposed upon the UBM 216, which are formed over the RDL214. In some embodiments, the connector 217 is used to electricallyconnect the InFO package 200 to other package components including, forexample, another device die, interposers, package substrates, printedcircuit boards, a mother board, and the like.

Next, the carrier 201 and adhesive layer 202 are removed from the InFOpackage 200. The resulting structure is shown in FIG. 1. In someembodiments, the polymer base layer 203 is also removed from the InFOpackage. In some alternative embodiments, the polymer base layer 203 isnot removed, and is left in the resulting package as a bottom protectivelayer.

The above illustrations include exemplary operations, but the operationsare not necessarily performed in the order shown. Operations may beadded, replaced, changed order, and/or eliminated as appropriate, inaccordance with the spirit and scope of various embodiments of thepresent disclosure.

Some embodiment of the present disclosure provides a semiconductorstructure. The semiconductor structure includes: a polymer base layer; abackside redistribution layer (RDL) over the polymer base layer; amolding layer over the backside RDL; a polymer layer over the moldinglayer; a front side RDL over the polymer layer; and ametal-insulator-metal (MIM) capacitor vertically passing through themolding layer, the MIM capacitor including a first electrode, aninsulation layer and a second electrode, wherein the insulation layersurrounds the first electrode, and the second electrode surrounds theinsulation layer, and the molding layer surrounds the second electrode.

Some embodiment of the present disclosure provides a semiconductorstructure. The semiconductor structure includes: a first redistributionlayer (RDL); a molding layer over the first RDL; a polymer layer overthe molding layer; a second RDL over the polymer layer; and ametal-insulator-metal (MIM) capacitor vertically passing through themolding layer, the MIM capacitor including a first electrode, aninsulation layer and a second electrode, wherein an outer sidewall andan outer bottom surface of the first electrode is lined with theinsulation layer, and an outer sidewall and an outer bottom surface ofthe insulation layer is lined with the second electrode.

Some embodiment of the present disclosure provides a method formanufacturing a semiconductor structure. The method includes: providinga polymer base layer; forming a first redistribution layer (RDL) overthe polymer base layer; forming a photoresist layer having an openingpassing through the photoresist layer over the first RDL; blanketdisposing a first conductive layer over the photoresist layer and theRDL; blanket disposing an insulation layer over the conductive layer;etching a portion of the insulation layer to expose a portion of thefirst conductive layer outside the opening; disposing a secondconductive layer over the insulation layer and the exposed firstconductive layer; and planarizing the second conductive layer until thephotoresist layer is exposed.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother operations and structures for carrying out the same purposesand/or achieving the same advantages of the embodiments introducedherein. Those skilled in the art should also realize that suchequivalent constructions do not depart from the spirit and scope of thepresent disclosure, and that they may make various changes,substitutions, and alterations herein without departing from the spiritand scope of the present disclosure.

Moreover, the scope of the present application is not intended to belimited to the particular embodiments of the process, machine,manufacture, composition of matter, means, methods and steps describedin the specification. As one of ordinary skill in the art will readilyappreciate from the disclosure of the present invention, processes,machines, manufacture, compositions of matter, means, methods, or steps,presently existing or later to be developed, that perform substantiallythe same function or achieve substantially the same result as thecorresponding embodiments described herein may be utilized according tothe present invention. Accordingly, the appended claims are intended toinclude within their scope such processes, machines, manufacture,compositions of matter, means, methods, or steps.

What is claimed is:
 1. A method for manufacturing a semiconductorstructure, comprising: providing a base layer; forming a photoresistlayer over the base layer, the photoresist layer having an opening;blanket disposing a first conductive layer over the photoresist layer;blanket disposing an insulation layer over the conductive layer; etchinga portion of the insulation layer to expose a portion of the firstconductive layer outside the opening; disposing a second conductivelayer over the insulation layer and the exposed first conductive layer;planarizing the second conductive layer until the photoresist layer isexposed; and removing the photoresist layer, wherein the firstconductive layer, the insulation layer and the second conductive layerform a metal-insulator-metal (MIM) capacitor.
 2. The method of claim 1,further comprising disposing a device die over the base layer.
 3. Themethod of claim 1, further comprising forming a molding layer over thebase layer.
 4. The method of claim 3, further comprising performing aplanarization process to remove excess portions of the molding layer toexpose the MIM capacitor.
 5. The method of claim 4, further comprisingremoving at least a top portion of the first conductive layer and a topportion of the second conductive layer.
 6. The method of claim 5,further comprising forming a redistribution layer (RDL) over the MIMcapacitor.
 7. The method of claim 1, wherein the insulation layerincludes high-k dielectric material.
 8. The method of claim 7, whereinthe insulation layer includes silicon nitride, silicon carbide,low-temperature silicon dioxide (SiO₂), silicon nitride (SiN_(x)),silicon oxynitride (SiO_(x)N_(y)), low-temperature titanium dioxide(TiO₂), zirconium dioxide (ZrO₂), aluminum oxide (Al₂O₃), hafnium oxide(HfO_(x)), Hafnium silicate (HfSiO_(x)), zirconium titanate (ZrTiO_(x)),tantalum oxide (TaO_(x)), strontium titanate (SrTiO₃), barium titanate(BaTiO3), barium strontium titanate (BaSrTiO₃), lead zirconate titanate(PbZrTiO₃), or a laminated layer of ZrO₂—Al₂O₃—ZrO₂.
 9. A method formanufacturing a semiconductor structure, comprising: providing a polymerbase layer; forming a redistribution layer (RDL) over the polymer baselayer; forming a photoresist layer having an opening passing through thephotoresist layer over the RDL; forming a metal-insulator-metal (MIM)capacitor vertically passing through the photoresist layer, the MIMcapacitor including a first electrode, an insulation layer and a secondelectrode, wherein an outer sidewall and an outer bottom surface of thefirst electrode is lined with the insulation layer, and an outersidewall and an outer bottom surface of the insulation layer is linedwith the second electrode; performing a CMP upon the MIM capacitor andthe photoresist layer; and removing the photoresist layer.
 10. Themethod of claim 9, further comprising disposing a device die over thepolymer base layer.
 11. The method of claim 9, further comprisingforming a molding layer over the base layer.
 12. The method of claim 9,further comprising removing at least a top portion of the firstconductive layer and a top portion of the second conductive layer. 13.The method of claim 11, further comprising forming a patterned polymerlayer having openings overlying the molding layer and the MIM capacitor.14. The method of claim 9, wherein the insulation layer includes high-kdielectric material.
 15. The method of claim 9, wherein the insulationlayer includes silicon nitride, silicon carbide, low-temperature silicondioxide (SiO₂), silicon nitride (SiN_(x)), silicon oxynitride(SiO_(x)N_(y)), low-temperature titanium dioxide (TiO₂), zirconiumdioxide (ZrO₂), aluminum oxide (Al₂O₃), hafnium oxide (HfO_(x)), Hafniumsilicate (HfSiO_(x)), zirconium titanate (ZrTiO_(x)), tantalum oxide(TaO_(x)), strontium titanate (SrTiO₃), barium titanate (BaTiO3), bariumstrontium titanate (BaSrTiO₃), lead zirconate titanate (PbZrTiO₃), or alaminated layer of ZrO₂—Al₂O₃—ZrO₂.
 16. A method for manufacturing asemiconductor structure, comprising: providing a polymer base layer;forming a first redistribution layer (RDL) over the polymer base layer;forming a photoresist layer having an opening passing through thephotoresist layer over the first RDL; blanket disposing a firstconductive layer over the photoresist layer and the first RDL; blanketdisposing an insulation layer over the conductive layer; etching aportion of the insulation layer to expose a portion of the firstconductive layer outside the opening; disposing a second conductivelayer over the insulation layer and the exposed first conductive layer;and planarizing the second conductive layer until the photoresist layeris exposed.
 17. The method of claim 16, further comprising: removing atop portion of the first electrode and a top portion of the secondelectrode to allow the insulation layer to protrude upward from a topsurface of the first electrode and a top surface of the secondelectrode.
 18. The method of claim 16, further comprising disposing adevice die over the polymer base layer.
 19. The method of claim 16,further comprising forming a molding layer over the polymer base layer.20. The method of claim 16, further comprising forming a second RDL overthe second conductive layer.